A Brief Knowledge about MEMS Technology
##plugins.themes.academic_pro.article.main##
Abstract
The definition of MEMS is Micro Electro Machine Systems. IC technology is the parent of MEMS technology.
MEMS packaging and fabrications are more complex than IC packaging and fabrications. These systems are more small, high efficient and have better performance. MEMS have the benefits of miniaturization of systems, better performance, less cost, large reduction in power consumption and several advanced systems which can change the new emerging technological world. The present paper gives the knowledge about MEMS technology, its fabrication process, Basic silicon MEMS techniques and the future of MEMS technology.
##plugins.themes.academic_pro.article.details##
How to Cite
A., V. R. (2014). A Brief Knowledge about MEMS Technology. The International Journal of Science & Technoledge, 2(3). Retrieved from http://internationaljournalcorner.com/index.php/theijst/article/view/128115